Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
고투과도 SiNx EUV용 펠리클 제작을 위한 HF thinning 공정 가능성 평가
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T06:43:05Z | - |
| dc.date.available | 2021-08-03T06:43:05Z | - |
| dc.date.issued | 2016-02-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/37484 | - |
| dc.title | 고투과도 SiNx EUV용 펠리클 제작을 위한 HF thinning 공정 가능성 평가 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 23회 한국 반도체 학술대회 | - |
| dc.citation.conferencePlace | 강원도 하이원리조트 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)