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HF 습식 식각을 이용한 극자외선 노광 기술용 SiNx 펠리클 제작 공정
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T07:05:11Z | - |
| dc.date.available | 2021-08-03T07:05:11Z | - |
| dc.date.issued | 2015-10-30 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/38617 | - |
| dc.title | HF 습식 식각을 이용한 극자외선 노광 기술용 SiNx 펠리클 제작 공정 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | ENGE 2015 | - |
| dc.citation.conferencePlace | 대전컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)