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Characterization of the SnO2 thin films by ozone based thermal atomic layer deposition

Authors
전형탁
Issue Date
20151028
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/38689
Place
ICC JEJU, KOREA
Conference Name
IUMRS-ICAM 2015
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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