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Design of Dislocation Sink to Suppress Threading Dislocation Density in Strain-relaxed SiGe Layer

Authors
박재근
Issue Date
15-Oct-2015
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/39076
Place
The University of Texas at Dallas
Conference Name
2015 SiWEDS Fall Meeting
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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