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The Effect of the Interaction Forces Between CeO2 and SiO2 on the Step Height Reduction During STI CMP
- Authors
- 백운규
- Issue Date
- 3-Sep-2015
- Place
- Icc jeju, Korea
- Conference Name
- The 11th Pacific Rim Conference of Ceramic Societies
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)