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수평 유동에서 열영동을 고려한 웨이퍼 표면으로의 국소 입자침착속도 예측 모델 개발
- Authors
- 육세진
- Issue Date
- 9-Jul-2015
- Publisher
- (사)한국입자에어로졸학회
- Citation
- 한국입자에어로졸학회 학술대회 2015
- Conference Name
- 한국입자에어로졸학회 학술대회 2015
- Place
- 용평리조트
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)