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Silicon on nothing 공정을 이용한 MEMS 절대압 압력센서 modeling
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 송윤흡 | - |
| dc.date.accessioned | 2021-08-03T07:27:03Z | - |
| dc.date.available | 2021-08-03T07:27:03Z | - |
| dc.date.issued | 2015-06-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/39752 | - |
| dc.title | Silicon on nothing 공정을 이용한 MEMS 절대압 압력센서 modeling | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2015 대한전자공학회 하계종합학술대회 | - |
| dc.citation.conferencePlace | 제주 라마다 호텔 | - |
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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Related Researcher
- Song, Yun Heub
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)