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Silicon on nothing 공정을 이용한 MEMS 절대압 압력센서 modeling
- Authors
- 송윤흡
- Issue Date
- 23-Jun-2015
- Place
- 제주 라마다 호텔
- Conference Name
- 2015 대한전자공학회 하계종합학술대회
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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Related Researcher
- Song, Yun Heub
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)