Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Investigation of Nickel Thin Film by Remote Plasma Atomic Layer Deposition and Nickel Silicide Formation
- Authors
- 전형탁
- Issue Date
- 29-Jun-2015
- Place
- Portland Hilton
- Conference Name
- ALD 2015
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.