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Effect of cylindrical-type antenna turns on the plasma parameters in inductively coupled plasmas
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T08:11:03Z | - |
| dc.date.available | 2021-08-03T08:11:03Z | - |
| dc.date.issued | 2015-03-27 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/41016 | - |
| dc.title | Effect of cylindrical-type antenna turns on the plasma parameters in inductively coupled plasmas | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 7th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials | - |
| dc.citation.conferencePlace | Nagoya University, Nagoya, Japan | - |
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)