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가열된 웨이퍼의 직육면체 용기 내에서의 입자 오염에 관한 연구
- Authors
- 육세진
- Issue Date
- 13-Nov-2014
- Publisher
- 대한기계학회
- Citation
- 대한기계학회 추계학술대회
- Conference Name
- 대한기계학회 추계학술대회
- Place
- 김대중컨벤션센터
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Collections - 서울 공과대학 > 서울 기계공학부 > 2. Conference Papers
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Related Researcher
- Yook, Se Jin
- COLLEGE OF ENGINEERING (SCHOOL OF MECHANICAL ENGINEERING)