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Plasma density dynamics during gas on/off
- Authors
- 정진욱
- Issue Date
- 9-Jul-2014
- Publisher
- The Korean Vaccum Society
- Citation
- 5th International Conference Microelectronics and Plasm Technology
- Conference Name
- 5th International Conference Microelectronics and Plasm Technology
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)