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Fabrication of SiOxNy barrier film for flexible organic photovoltaic by plasma enhanced chemical vapor deposition

Authors
김태환
Issue Date
8-Jul-2014
Publisher
The Korea Vacuum Society
Citation
International Conference on Microelectronics and Plasma Technology 2014
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/43629
Conference Name
International Conference on Microelectronics and Plasma Technology 2014
Place
Gunsan, Korea
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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