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Design of Extremely Proximity Gettering using MeV-nitrogen Ion Implantation for Si C-MOS Image Sensor

Authors
박재근
Issue Date
8-May-2014
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/44455
Place
The University of Texas at Dallas
Conference Name
2014 SiWEDS Spring Meeting
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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