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Distribution of Plasma Parameters at Wafer Level Measured by 2D Plasma Parameter Diagnostic Method in Inductively Coupled Plasmas
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T10:35:52Z | - |
| dc.date.available | 2021-08-03T10:35:52Z | - |
| dc.date.created | 2021-06-30 | - |
| dc.date.issued | 2014-02-26 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/45112 | - |
| dc.publisher | 한양대학교 | - |
| dc.title | Distribution of Plasma Parameters at Wafer Level Measured by 2D Plasma Parameter Diagnostic Method in Inductively Coupled Plasmas | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | 정진욱 | - |
| dc.identifier.bibliographicCitation | 제21회 한국반도체학술대회 | - |
| dc.relation.isPartOf | 제21회 한국반도체학술대회 | - |
| dc.citation.title | 제21회 한국반도체학술대회 | - |
| dc.citation.conferencePlace | 한양대학교 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)