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Fabrication and EUV Transmittance Estimation of Pellicle for EUVL and EUV Optical Performance Simulation of Mesh-less Pellicle
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T11:17:46Z | - |
| dc.date.available | 2021-08-03T11:17:46Z | - |
| dc.date.issued | 2013-11-21 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/45734 | - |
| dc.title | Fabrication and EUV Transmittance Estimation of Pellicle for EUVL and EUV Optical Performance Simulation of Mesh-less Pellicle | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 방사광이용자연구발표회 및 정기총회 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)