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Characteristics of Tin Sulfide Grown Thin films using Tetrakis(dimethylamino)Tin and Hydrogen Sulfur by Atomic Layer Deposition

Authors
전형탁
Issue Date
7-Nov-2013
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/45985
Place
제주도 롯데호텔
Conference Name
2013 한국재료학회 추계학술발표대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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