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디스플레이 백플레인용 노광장치에서 해상력 향상을 위한 Rim Type Phase Shift Mask 시뮬레이션 평가
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T11:35:27Z | - |
| dc.date.available | 2021-08-03T11:35:27Z | - |
| dc.date.issued | 20131025 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/46463 | - |
| dc.title | 디스플레이 백플레인용 노광장치에서 해상력 향상을 위한 Rim Type Phase Shift Mask 시뮬레이션 평가 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 친환경 전자재료 및 나노기술 학술대회(ENGE2013) | - |
| dc.citation.conferencePlace | 광주 김대중컨벤션센터 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)