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원자층증착법을 이용한 Y2O3 박막 형성 및 저항 스위칭 특성
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T12:17:40Z | - |
| dc.date.available | 2021-08-03T12:17:40Z | - |
| dc.date.issued | 20130822 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/47213 | - |
| dc.title | 원자층증착법을 이용한 Y2O3 박막 형성 및 저항 스위칭 특성 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제45회 한국진공학회 하계학술대회 | - |
| dc.citation.conferencePlace | 한국 여수 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)