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Time dependent precursor quality variation of liquid CpZr(DMA)3 and its ALD-ZrO2 film
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안진호 | - |
| dc.date.accessioned | 2021-08-03T12:18:52Z | - |
| dc.date.available | 2021-08-03T12:18:52Z | - |
| dc.date.issued | 2013-07-28 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/47338 | - |
| dc.title | Time dependent precursor quality variation of liquid CpZr(DMA)3 and its ALD-ZrO2 film | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 13th International Conference on Atomic Layer Deposition | - |
| dc.citation.conferencePlace | 미국 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)