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Comparative Study Between Sputtered Ru and ALD Ru for Schottky Contact Diode

Authors
최창환
Issue Date
23-May-2013
Publisher
한국재료학회
Citation
한국재료학회 춘계학술대회
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48083
Conference Name
한국재료학회 춘계학술대회
Place
여수
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Choi, Chang hwan
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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