Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The investigation of plasma pre-treatment for Ru deposition by plasma enhanced atomic layer deposition
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T12:36:09Z | - |
| dc.date.available | 2021-08-03T12:36:09Z | - |
| dc.date.issued | 2013-05-23 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48092 | - |
| dc.title | The investigation of plasma pre-treatment for Ru deposition by plasma enhanced atomic layer deposition | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 춘계학술발표대회 | - |
| dc.citation.conferencePlace | 여수 엠블호텔(THE MVL) | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.