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The investigation of plasma pre-treatment for Ru deposition by plasma enhanced atomic layer deposition
- Authors
- 전형탁
- Issue Date
- 23-May-2013
- Place
- 여수 엠블호텔(THE MVL)
- Conference Name
- 춘계학술발표대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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