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Grain size evaluation of crystalline HfO2thinfilms

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dc.contributor.author안진호-
dc.date.accessioned2021-08-03T12:49:11Z-
dc.date.available2021-08-03T12:49:11Z-
dc.date.issued2013-05-03-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48356-
dc.titleGrain size evaluation of crystalline HfO2thinfilms-
dc.typeConference-
dc.citation.conferenceNameHanaro symposium 2013-
dc.citation.conferencePlace한국원자력연구원 국제원자력교육훈련센터(INTEC)-
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