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유도 결합 산소 플라즈마에서 고조화파 분석법을 이용한 음이온 공간 분포 측정
- Authors
- 정진욱
- Issue Date
- 18-Feb-2013
- Publisher
- 한국진공학회
- Citation
- 제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
- Conference Name
- 제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)
- Place
- 휘닉스파크
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- There are no files associated with this item.
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)