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SMP(Symmetric Multi-Power) 안테나에 의한 플라즈마 밀도 분포 개선에 대한 연구

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dc.contributor.author정진욱-
dc.date.accessioned2021-08-03T13:20:17Z-
dc.date.available2021-08-03T13:20:17Z-
dc.date.created2021-06-30-
dc.date.issued2013-02-18-
dc.identifier.urihttps://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48989-
dc.publisher한국진공학회-
dc.titleSMP(Symmetric Multi-Power) 안테나에 의한 플라즈마 밀도 분포 개선에 대한 연구-
dc.typeConference-
dc.contributor.affiliatedAuthor정진욱-
dc.identifier.bibliographicCitation제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)-
dc.relation.isPartOf제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)-
dc.citation.title제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society)-
dc.citation.conferencePlace휘닉스파크-
dc.type.rimsCONF-
dc.description.journalClass2-
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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