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SMP(Symmetric Multi-Power) 안테나에 의한 플라즈마 밀도 분포 개선에 대한 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T13:20:17Z | - |
| dc.date.available | 2021-08-03T13:20:17Z | - |
| dc.date.issued | 2013-02-18 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/48989 | - |
| dc.title | SMP(Symmetric Multi-Power) 안테나에 의한 플라즈마 밀도 분포 개선에 대한 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 제 44회 한국진공학회(The 44th Winter Annual Conference of the Korean Vacuum Society) | - |
| dc.citation.conferencePlace | 휘닉스파크 | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)