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Characterization and calibration of a capacitive diaphragm gauge manometer for the measurement of dust particles in TReD(Transport and Removal experiment of dust) device

Authors
정규선
Issue Date
2-Feb-2013
Publisher
ICPlant 2013 Organizing Committee
Citation
The 6th International Conference on PLAsma NanoTechnology & Science
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/49039
Conference Name
The 6th International Conference on PLAsma NanoTechnology & Science
Place
일본
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서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers

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