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Measurement of Negative Ions using Cylindrical Probe and Planar Probe in Ar/SF6 Plasmas
- Authors
- 정규선
- Issue Date
- 28-Jan-2013
- Publisher
- ISPlasma 2013 Organizing Committee
- Citation
- 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Conference Name
- 5th International Symposium on Advanced Plasma Science and its Applications for Nitrides and Nanomaterials
- Place
- 일본
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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