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Effect of Negative Ions Measured Using Comparative Diagnostics in Ar/SF6 Plasma
- Authors
- 정규선
- Issue Date
- 23-Aug-2012
- Publisher
- Center for Edge Plasma Science
- Citation
- JK Seminar 2012 for Plasma Diagnostics
- Conference Name
- JK Seminar 2012 for Plasma Diagnostics
- Place
- 한국
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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