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Investigation for reaction mechanism on ALD and CVD of Cobalt from dicobalt hexacarbonyl tert-butylacetylene
- Authors
- 전형탁
- Issue Date
- 20120816
- Place
- 코엑스
- Conference Name
- 2012 Nano Korea
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)