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Atomic Layer Deposition of Indium Oxide Using a Liquid Indium Precursor
- Authors
- 박진성
- Issue Date
- 17-Jun-2012
- Publisher
- namlab, nanogune
- Citation
- 12th International Conference on Atomic Layer Deposition(ALD 2012)
- Conference Name
- 12th International Conference on Atomic Layer Deposition(ALD 2012)
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)