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Dependence of Copper Gettering on Crystalline Nature in As-grown CZ Silicon Wafer
- Authors
- 박재근
- Issue Date
- 8-May-2012
- Place
- Washington State Convention Center, Seattle, USA
- Conference Name
- 221st ECS Meeting
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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