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0차원 모델을 이용한 공정장비 Scale up 연구
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T15:47:45Z | - |
| dc.date.available | 2021-08-03T15:47:45Z | - |
| dc.date.issued | 2012-02-10 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/52671 | - |
| dc.title | 0차원 모델을 이용한 공정장비 Scale up 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국진공학회 동계정기 학술대회 | - |
| dc.citation.conferencePlace | 보광휘닉스파크 | - |
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