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Molecular Layer Deposition of Titanium Nitride Cross-linked Benzene Using Titaniumchloride and 1,4-Phenylenediamine
- Authors
- 성명모
- Issue Date
- 10-Feb-2012
- Publisher
- 한국진공학회
- Citation
- 제42회 한국진공학회
- Conference Name
- 제42회 한국진공학회
- Place
- 보광휘닉스파크
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Collections - 서울 자연과학대학 > 서울 화학과 > 2. Conference Papers
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Related Researcher
- Sung, Myung Mo
- COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)