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Multi-step Ion Beam Etching of Sub-30 nm Scale Magnetic Tunnel Junctions for Reducing Leakage Path and MgO Barrier Damage
- Authors
- 이승백
- Issue Date
- 2-Nov-2011
- Place
- Scottsdale, Arizona, USA
- Conference Name
- 58th annual conference on magnetism and magnetic materials
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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Related Researcher
- Lee, Seung Beck
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)