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Vapor-Phase Fabrication of Organic-Inorganic Hybrid Thin Films Using Moleqular Layer Deposition with Atomic Layer Deposition

Authors
성명모
Issue Date
2-Nov-2011
Publisher
AVS
Citation
AVS 58th International Symposium & Exhibition
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/53590
Conference Name
AVS 58th International Symposium & Exhibition
Place
Nashville Convention Center
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서울 자연과학대학 > 서울 화학과 > 2. Conference Papers

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COLLEGE OF NATURAL SCIENCES (DEPARTMENT OF CHEMISTRY)
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