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Photoluminescence characteristics of TiO2 film deposited on vertically oriented Si nanowire by remote plasma atomic layer deposition

Authors
전형탁
Issue Date
20111030
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/53617
Place
Nashville convention center
Conference Name
AVS 58th International Symposium & Exhibition
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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