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Photoluminescence characteristics of TiO2 film deposited on vertically oriented Si nanowire by remote plasma atomic layer deposition
- Authors
- 전형탁
- Issue Date
- 30-Oct-2011
- Place
- Nashville convention center
- Conference Name
- AVS 58th International Symposium & Exhibition
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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