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Improvement in the bias stability of IGZO thin film transistors using Al2O3 buffer layer growth on Si3N4 dielectric layer

Authors
전형탁
Issue Date
20111027
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/53735
Place
신라대학교
Conference Name
2011 한국재료학회 추계학술발표대회 및 제 21회 신소재 심포지엄
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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