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Design of Extreme Proximity Gettering for Advanced Semiconductor Devices Beyond 3X nm Technology - Understanding the dependency of Ta decoration on crystalline nature after device heat-treatment of 3X technology
- Authors
- 박재근
- Issue Date
- 14-Oct-2011
- Place
- Westin Boston Waterfront and the Boston Convention and Exhibition Center
- Conference Name
- 2011 SiWEDS Fall Meeting
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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