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RuO2 환원층을 이용한 ALD Ru 박막 증착
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T16:36:04Z | - |
| dc.date.available | 2021-08-03T16:36:04Z | - |
| dc.date.issued | 2011-10-13 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/53999 | - |
| dc.title | RuO2 환원층을 이용한 ALD Ru 박막 증착 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국반도체디스플레이기술학회 2011년 추계 심포지움 | - |
| dc.citation.conferencePlace | 킨텍스 회의실 207호 | - |
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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