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RuO2 환원층을 이용한 ALD Ru 박막 증착
- Authors
- 전형탁
- Issue Date
- 13-Oct-2011
- Place
- 킨텍스 회의실 207호
- Conference Name
- 한국반도체디스플레이기술학회 2011년 추계 심포지움
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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