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High-k oxide deposition with remote plasma atomic layer deposition
- Authors
- 전형탁
- Issue Date
- 21-Sep-2011
- Place
- Taipei world trade center Nangang exhibition hall
- Conference Name
- IUMRS-ICA 2011
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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