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충돌주파수가 고주파 수평행평판플라즈마의 전기장 균일도에 미치는 영향 연구
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T16:52:26Z | - |
| dc.date.available | 2021-08-03T16:52:26Z | - |
| dc.date.issued | 2011-08-19 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/54569 | - |
| dc.title | 충돌주파수가 고주파 수평행평판플라즈마의 전기장 균일도에 미치는 영향 연구 | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 한국진공학회 하계 정기 학술대회 | - |
| dc.citation.conferencePlace | 대구 exco | - |
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)