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Investigating film property and growth behavior for rapid SiO2 atomic layer deposition
- Authors
- 박진성
- Issue Date
- 28-Jul-2011
- Publisher
- The korean vacuum society, SKKU, GNU, SRC, korea battery society
- Citation
- 2011 International Forum on Functional Materials(IFFM 2011) The 2nd Special Symposium on Advances in Functional Materials(AFM-2)
- Conference Name
- 2011 International Forum on Functional Materials(IFFM 2011) The 2nd Special Symposium on Advances in Functional Materials(AFM-2)
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Park, Jinseong
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)