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Detection and removal of airborne nanoparticles using kinetic and electrostatic force of paddle-type bridge MEMS sensors

Authors
이승백
Issue Date
6-Jul-2011
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/54791
Place
Ramada Plaza Jeju Hotel, Jeju
Conference Name
International Symposium on the Physics of Semiconductors and Applications 2011
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서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)
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