Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
spatial evolutions of the electron distributions in a weakly magnetized solenoidal-type inductively coupled plasma
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 정진욱 | - |
| dc.date.accessioned | 2021-08-03T17:19:02Z | - |
| dc.date.available | 2021-08-03T17:19:02Z | - |
| dc.date.issued | 2011-07-06 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/54798 | - |
| dc.title | spatial evolutions of the electron distributions in a weakly magnetized solenoidal-type inductively coupled plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | the third international conference on microelectronics and plasma technology | - |
| dc.citation.conferencePlace | dalian,china | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)