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효율적인 원자층 증착 순서에 의한 Al 도펀트의 ZnO 박막에의 균일한 분포에 대한 연구

Authors
전형탁
Issue Date
20110602
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/55116
Place
서울대학교 엔지니어하우스
Conference Name
한국반도체디스플레이기술학회 2011년 춘계 학술대회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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Jeon, Hyeongtag
COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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