Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The effects of RF powere on remote plasma atomic layer deposited Al2O3 passivation layer to improve the electrical stability of IGZO TFTs
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-08-03T17:32:57Z | - |
| dc.date.available | 2021-08-03T17:32:57Z | - |
| dc.date.issued | 20110526 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/55195 | - |
| dc.title | The effects of RF powere on remote plasma atomic layer deposited Al2O3 passivation layer to improve the electrical stability of IGZO TFTs | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2011 한국재료학회 춘계학술발표대회 및 제 20회 신소재 심포지엄 | - |
| dc.citation.conferencePlace | 제주 휘닉스 아일랜드 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)