Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The effects of RF powere on remote plasma atomic layer deposited Al2O3 passivation layer to improve the electrical stability of IGZO TFTs
- Authors
- 전형탁
- Issue Date
- 20110526
- Place
- 제주 휘닉스 아일랜드
- Conference Name
- 2011 한국재료학회 춘계학술발표대회 및 제 20회 신소재 심포지엄
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)