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Diffusionless Annealing for Flatband Voltage Tuning of PMOS devices with High-k/Metal Gate Stack
- Authors
- 최창환
- Issue Date
- 18-Feb-2011
- Place
- 제주 해비치호텔
- Conference Name
- 18회 한국반도체학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)